(19)
(11) EP 1 725 343 A2

(12)

(88) Date of publication A3:
27.04.2006

(43) Date of publication:
29.11.2006 Bulletin 2006/48

(21) Application number: 05725443.5

(22) Date of filing: 11.03.2005
(51) International Patent Classification (IPC): 
B06B 1/02(2006.01)
(86) International application number:
PCT/US2005/008259
(87) International publication number:
WO 2005/087391 (22.09.2005 Gazette 2005/38)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR LV MK YU

(30) Priority: 11.03.2004 US 552082 P
07.02.2005 WO PCT/US2005/003898
07.02.2005 US 53672
28.02.2005 WO PCT/US2005/006474
28.02.2005 US 68005
28.02.2005 US 68129
28.02.2005 WO PCT/US2005/006408

(71) Applicant: Georgia Technology Research Corporation
Atlanta, GA 30332 (US)

(72) Inventors:
  • DEGERTEKIN, F., Levent
    Decatur, GA 30033 (US)
  • MCLEAN, Jeffrey, John
    Baton Rouge, LA 70808 (US)
  • KNIGHT, Joshua, Glenn
    Columbus, IN 47203 (US)

(74) Representative: Harrison Goddard Foote 
Belgrave Hall Belgrave Street
Leeds LS2 8DD
Leeds LS2 8DD (GB)

   


(54) ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS