(19)

(11)

EP 1 730 246 A2

(12)

(88) Date of publication A3: 29.12.2005 (43) Date of publication: 13.12.2006 Bulletin 2006/50 (21) Application number: 05725517.6 (22) Date of filing: 14.03.2005

(51) International Patent Classification (IPC):  C09G 1/02(2006.01) H01L 21/321(2006.01) (86) International application number: PCT/US2005/008411 (87) International publication number: WO 2005/100496 (27.10.2005 Gazette 2005/43)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 24.03.2004 US 807944 (71) Applicant: CABOT MICROELECTRONICS CORPORATION Aurora, IL 60504 (US)

(72) Inventors: DE REGE THESAURO, F.; c/o Cabot Micro. Co. Aurora , Illinois 60504 (US) MOEGGENBORG, K.; c/o Cabot Micro. Co. Aurora , Illinois 60504 (US) BRUSIC, V.; c/o Cabot Micro. Co. Aurora , Illinois 60504 (US) BAYER, B.; c/o Cabot Micro. Co. Aurora , Illinois 60504 (US) (74) Representative: Trueman, Lucy Petra et al Barker Brettell, 138 Hagley Road, Edgbaston Birmingham B16 9PW Birmingham B16 9PW (GB)