(19)

(11)

EP 1 733 071 A2

(12)

(88) Date of publication A3: 04.05.2006 (43) Date of publication: 20.12.2006 Bulletin 2006/51 (21) Application number: 05734780.9 (22) Date of filing: 24.03.2005

(51) International Patent Classification (IPC):  C23C 16/44(2006.01) H01J 37/32(2006.01) (86) International application number: PCT/US2005/010691 (87) International publication number: WO 2005/095670 (13.10.2005 Gazette 2005/41)

(84) Designated Contracting States: DE FR GB IE IT NL (30) Priority: 24.03.2004 US 556227 P 30.12.2004 US 640833 P 30.12.2004 US 640444 P (71) Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY Cambridge, MA 02142-1324 (US)	(72) Inventors: SAWIN, Herbert, Harold Chestnut Hill, Massachusetts 02467 (US) BAI, Bo Cambridge, Massachusetts 02142 (US) (74) Representative: Matthews, Derek Peter  Frank B. Dehn & Co. St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)