(19)
(11) EP 1 733 411 A1

(12)

(43) Date of publication:
20.12.2006 Bulletin 2006/51

(21) Application number: 04716162.5

(22) Date of filing: 01.03.2004
(51) International Patent Classification (IPC): 
H01J 37/32(2006.01)
H05H 1/32(2006.01)
(86) International application number:
PCT/US2004/006234
(87) International publication number:
WO 2005/096345 (13.10.2005 Gazette 2005/41)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(71) Applicant: GENERAL ELECTRIC COMPANY
Schenectady, NY 12345 (US)

(72) Inventors:
  • SCHAEPKENS, Marc
    Ballston Lake, NY 12019 (US)
  • IACOVANGELO, Charles, Dominic
    Clifton Park, NY 12065 (US)
  • JOHNSON, James, Neil
    Niskayuna, NY 12309 (US)
  • MORRISON, William, Arthur
    Albany, NY 12205 (US)

(74) Representative: Illingworth-Law, William Illingworth 
GE - London Patent Operation 15 John Adam Street
London WC2N 6LU
London WC2N 6LU (GB)

   


(54) APPARATUS AND METHOD FOR PLASMA TREATING AN ARTICLE