| (84) |
Designated Contracting States: |
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DE FR GB IT NL |
| (30) |
Priority: |
18.04.2004 US 563527 P 17.04.2005 US 108350
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| (71) |
Applicant: Entegris, Inc. |
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Chaska, MN 55318 (US) |
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| (72) |
Inventors: |
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- RAUWORTH, Barry, L.
Young America, MN 55397 (US)
- HENNEN, John, M.
Carver, MN 55315 (US)
- WHALEN, Thomas
Minnetrista, MN 55364 (US)
- MAENKE, Dale
Chaska, MN 55318 (US)
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| (74) |
Representative: Geyer, Fehners & Partner |
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Patentanwälte
Perhamerstraße 31 80687 München 80687 München (DE) |
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