(84) |
Designated Contracting States: |
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AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI
SK TR |
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Designated Extension States: |
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AL BA HR LV MK YU |
(30) |
Priority: |
13.04.2004 US 823127
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(71) |
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. |
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Danbury, CT 06810-0855 (US) |
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(72) |
Inventors: |
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- O'DOUGHERTY, Kevin T.
7 Commerce Drive,
Danbury, CT 06810-0855 (US)
- OBERG, Russell F.
Danbury, CT 06810-0855 (US)
- MENNING, Joseph P.
7 Commerce Drive, Danbury, CT 06810-0855 (US)
- EIDEN, Gregory, B.
7 Commerce Drive, Danbury, CT 06810-0855 (US)
- GRANT, Donald C.
7 Commerce Drive, Danbury, CT 06810-0855 (US)
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(74) |
Representative: Elsworth, Dominic Stephen et al |
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Hargreaves Elsworth
Suite 14
I6, Charlotte Square Newcastle-upon-Tyne, NE1 4XF Newcastle-upon-Tyne, NE1 4XF (GB) |
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