(84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI
SK TR |
|
Designated Extension States: |
|
AL BA HR LV MK YU |
(30) |
Priority: |
18.04.2004 US 563529 P 17.04.2005 US 108349
|
(71) |
Applicant: Entegris, Inc. |
|
Chaska, MN 55318 (US) |
|
(72) |
Inventors: |
|
- TIEBEN, Anthony, Mathius
Jordon, MN 55352 (US)
- LYSTAD, John
Bloomington, MN 55438 (US)
|
(74) |
Representative: Geyer, Fehners & Partner |
|
Patentanwälte
Perhamerstraße 31 80687 München 80687 München (DE) |
|