(19)

(11)

EP 1 737 998 A2

(12)

(88) Date of publication A3: 16.11.2006 (43) Date of publication: 03.01.2007 Bulletin 2007/01 (21) Application number: 05760434.0 (22) Date of filing: 24.03.2005

(51) International Patent Classification (IPC):  C23C 16/44(2006.01) H01L 21/00(2006.01) (86) International application number: PCT/US2005/010693 (87) International publication number: WO 2005/090638 (29.09.2005 Gazette 2005/39)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR LV MK YU (30) Priority: 24.03.2004 US 556227 P 30.12.2004 US 640833 P 30.12.2004 US 640444 P (71) Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY Cambridge, MA 02142-1493 (US)	(72) Inventors: BAI, Bo Cambridge, MA 02142 (US) SAWIN, Herbert, Harold Chestnut Hill, MA 02467 (US) (74) Representative: Matthews, Derek Peter  Frank B. Dehn & Co. St Bride's House 10 Salisbury Square London EC4Y 8JD London EC4Y 8JD (GB)