(19)
(11) EP 1 740 920 A1

(12)

(43) Date of publication:
10.01.2007 Bulletin 2007/02

(21) Application number: 04727905.4

(22) Date of filing: 16.04.2004
(51) International Patent Classification (IPC): 
G01M 11/00(2006.01)
(86) International application number:
PCT/EP2004/050545
(87) International publication number:
WO 2005/100943 (27.10.2005 Gazette 2005/43)
(84) Designated Contracting States:
DE FR GB

(71) Applicant: Agilent Technologies, Inc.
Palo Alto, CA 94306 (US)

(72) Inventors:
  • JAHN, Robert
    71131 Oberjettingen (DE)
  • BELLER, Josef
    72074 Tübingen (DE)
  • HOFFMANN, Peter
    71032 Böblingen (DE)

(74) Representative: Neuerburg, Gerhard 
Agilent Technologies Deutschland GmbH Patentabteilung Herrenbergerstrasse 130
71034 Böblingen
71034 Böblingen (DE)

   


(54) VISUAL INSPECTION OF OPTICAL ELEMENTS