(19)

(11)

EP 1 741 127 A1

(12)

(43) Date of publication: 10.01.2007 Bulletin 2007/02 (21) Application number: 04822037.0 (22) Date of filing: 30.04.2004

(51) International Patent Classification (IPC):  H01L 21/22(2006.01) (86) International application number: PCT/US2004/013584 (87) International publication number: WO 2005/114712 (01.12.2005 Gazette 2005/48)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR (71) Applicant: Picometrix, LLC Ann Arbor, MI 48104 (US)	(72) Inventors: KO, Cheng, C. Ann Arbor, MI 48105 (US) LEVINE, Barry Livingston, NJ 07039 (US) (74) Representative: Solf, Alexander  Patentanwälte Dr. Solf & Zapf Candidplatz 15 81543 München 81543 München (DE)