Method of fabrication of a SPM thin line probe

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EP 1 742 034 B8

(12)	CORRECTED EUROPEAN PATENT SPECIFICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 2 (W2 B1)

(48)	Corrigendum issued on:
	19.12.2018 Bulletin 2018/51

(45)	Mention of the grant of the patent:
	10.10.2018 Bulletin 2018/41

(21)	Application number: 05734701.5

(22)	Date of filing: 20.04.2005

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International Patent Classification (IPC):

G01Q 70/12^(2010.01)

(86)	International application number:
	PCT/JP2005/007946

(87)	International publication number:
	WO 2005/103648 (03.11.2005 Gazette 2005/44)

(54)	Method of fabrication of a SPM thin line probe Verfahren zur Herstellung eines SPM-Trägers mit dünner Sonde Procédé de fabrication d'un support SPM avec une mince sonde

(84)	Designated Contracting States:
	DE GB

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Priority:

26.04.2004 JP 2004129383

(43)	Date of publication of application:
	10.01.2007 Bulletin 2007/02

(73)	Proprietor: Olympus Corporation
	Tokyo 192-8507 (JP)

(72)	Inventors:
	KITAZAWA, Masashi Ina-shi, Nagano 396-0011 (JP) OTA, Ryo Kamiina-gun, Nagano 399-4600 (JP) TANEMURA, Masaki Owariasahi-shi, Aichi 488-0056 (JP)

(74)	Representative: Winter, Brandl, Fürniss, Hübner, Röss, Kaiser, Polte - Partnerschaft mbB
	Patent- und Rechtsanwaltskanzlei Alois-Steinecker-Strasse 22 85354 Freising 85354 Freising (DE)

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References cited: :

EP-A- 1 278 055
EP-A1- 1 054 249
JP-A- 8 285 872
JP-A- 2003 090 788
US-A- 5 171 992
US-A1- 2003 172 726

EP-A- 1 336 835
DE-A1- 19 825 404
JP-A- 2000 249 712
JP-A- 2003 240 700
US-A1- 2003 122 072

KADO H ET AL: "A novel ZnO whisker tip for atomic force microscopy" ULTRAMICROSCOPY NETHERLANDS, vol. 42-44, July 1992 (1992-07), pages 1659-1663, XP002462053 ISSN: 0304-3991
LEE K L ET AL: "SUBMICRON SI TRENCH PROFILING WITH AN ELECTRON-BEAM FABRICATED ATOMIC FORCE MICROSCOPE TIP" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, NEW YORK, NY, US, vol. B09, no. 6, September 1991 (1991-09), pages 3562-3568, XP000961453 ISSN: 0022-5355
KELLER D J ET AL: "Imaging steep, high structures by scanning force microscopy with electron beam deposited tips" SURFACE SCIENCE NETHERLANDS, vol. 268, no. 1-3, 1 May 1992 (1992-05-01), pages 333-339, XP002462054 ISSN: 0039-6028

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