(19)
(11) EP 1 743 368 A1

(12)

(43) Date of publication:
17.01.2007 Bulletin 2007/03

(21) Application number: 04821957.0

(22) Date of filing: 30.11.2004
(51) International Patent Classification (IPC): 
H01L 21/78(2006.01)
(86) International application number:
PCT/KR2004/003127
(87) International publication number:
WO 2005/109492 (17.11.2005 Gazette 2005/46)
(84) Designated Contracting States:
DE NL

(30) Priority: 07.05.2004 KR 2004032326

(71) Applicant: Hanmi Semiconductor Co., Ltd.
Incheon 404-250 (KR)

(72) Inventors:
  • NA, Ik-Kyun, 202-1506, Jugong Apt.
    Incheon 403-854 (KR)
  • KIM, Suk-Bae, 105-1103, Hankuk Apt.
    Incheon 403-101 (KR)
  • CHOI, Seung-Hee, 101-104, Jugong Apt.
    Incheon 405-850 (KR)

(74) Representative: Thun, Clemens 
Mitscherlich & Partner Sonnenstrasse 33
80331 München
80331 München (DE)

   


(54) SAWING AND HANDLER SYSTEM FOR MANUFACTURING SEMICONDUCTOR PACKAGE