(19)
(11) EP 1 745 503 A2

(12)

(88) Date of publication A3:
26.05.2006

(43) Date of publication:
24.01.2007 Bulletin 2007/04

(21) Application number: 05746857.1

(22) Date of filing: 10.05.2005
(51) International Patent Classification (IPC): 
H01L 21/20(2006.01)
C30B 29/52(2006.01)
 H01L 21/285(2006.01)
(86) International application number:
PCT/US2005/016160
(87) International publication number:
WO 2005/112577 (01.12.2005 Gazette 2005/48)
(84) Designated Contracting States:
DE NL

(30) Priority: 14.05.2004 US 845984

(71) Applicant: APPLIED MATERIALS, INC.
Santa Clara, California 95054-3299 (US)

(72) Inventors:
  • SAMOILOV, Arkadaii V.
    Sunnyvale, CA 96087 (US)
  • KIM, Yihwan
    Milpitas, CA 95035 (US)
  • SANCHEZ, Errol
    Dublin, CA 94568 (US)
  • DALIDA, Nicholas C.
    Fremont, CA 94538 (US)

(74) Representative: Bayliss, Geoffrey Cyril 
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) METHODS TO FABRICATE MOSFET DEVICES USING SELECTIVE DEPOSITION PROCESSES