METALLIC THIN FILM PIEZORESISTIVE TRANSDUCTION IN MICROMECHANICAL AND NANOMECHANICAL DEVICES AND ITS APPLICATION IN SELF-SENSING SPM PROBES - Patent 1749185

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EP 1 749 185 A2

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(43)	Date of publication:
	07.02.2007 Bulletin 2007/06

(21)	Application number: 05736813.6

(22)	Date of filing: 15.04.2005

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International Patent Classification (IPC):

G01B 5/28^(2006.01)

(86)	International application number:
	PCT/US2005/013101

(87)	International publication number:
	WO 2005/103604 (03.11.2005 Gazette 2005/44)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA HR LV MK YU

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Priority:

15.04.2004 US 562652 P
16.04.2004 US 826007

(71)	Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY
	Pasadena, CA 91125 (US)

(72)	Inventors:
	TANG, Hongxing Pasadena, CA 91106 (US) LI, Mo Pasadena, CA 91106-3126 (US) ROUKES, Michael, L. Pasadena, CA 91106 (US)

(74)	Representative: Sörby, Lennart et al
	Dr. Ludwig Brann Patentbyrä AB Box 171 92 104 62 Stockholm 104 62 Stockholm (SE)

(54)	METALLIC THIN FILM PIEZORESISTIVE TRANSDUCTION IN MICROMECHANICAL AND NANOMECHANICAL DEVICES AND ITS APPLICATION IN SELF-SENSING SPM PROBES