(19)
(11) EP 1 751 790 A2

(12)

(88) Date of publication A3:
16.11.2006

(43) Date of publication:
14.02.2007 Bulletin 2007/07

(21) Application number: 05758045.8

(22) Date of filing: 29.04.2005
(51) International Patent Classification (IPC): 
H01L 21/302(2006.01)
(86) International application number:
PCT/US2005/015016
(87) International publication number:
WO 2005/109488 (17.11.2005 Gazette 2005/46)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR LV MK YU

(30) Priority: 30.04.2004 US 566397 P
02.07.2004 US 584850 P

(71) Applicant: Becton, Dickinson and Company
Franklin Lakes, New Jersey 07417 (US)

(72) Inventors:
  • HUGHES, James
    Dracut, Massachusetts 01826 (US)
  • DASKAL, Vadim
    Watertown, Massachusetts 02472 (US)
  • KEENAN, Joseph
    Cohasset, Massachusetts 02025 (US)
  • KISS, Attila
    North Andover, Massachusetts 01845 (US)
  • CHAVEZ, Susan
    Lancaster, Massachusetts 01523 (US)

(74) Representative: Weber, Thomas 
Patentanwälte von Kreisler-Selting-Werner, Deichmannhaus am Dom, Bahnhofsvorplatz 1
50667 Köln
50667 Köln (DE)

   


(54) METHODS OF FABRICATING COMPLEX BLADE GEOMETRIES FROM SILICON WAFERS AND STRENGTHENING BLADE GEOMETRIES