(19)

(11)

EP 1 756 328 A2

(12)

(88) Date of publication A3: 06.04.2006 (43) Date of publication: 28.02.2007 Bulletin 2007/09 (21) Application number: 05763357.0 (22) Date of filing: 15.06.2005

(51) International Patent Classification (IPC):  C23C 16/00(2006.01) C23C 16/06(2006.01) (86) International application number: PCT/US2005/021291 (87) International publication number: WO 2005/124849 (29.12.2005 Gazette 2005/52)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 15.06.2004 US 869779 (71) Applicant: Aviza Technology, Inc. Scotts Valley, CA 95066 (US)	(72) Inventor: SENZAKI, Yoshihide Austin, TX 78741 (US) (74) Representative: Dunlop, Brian Kenneth Charles et al Wynne-Jones, Lainé & James 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ Cheltenham Gloucestershire GL50 1JJ (GB)