(19)

(11)

EP 1 756 329 A1

(12)

(43) Date of publication: 28.02.2007 Bulletin 2007/09 (21) Application number: 05747858.8 (22) Date of filing: 20.05.2005

(51) International Patent Classification (IPC):  C23C 16/40(2006.01) C23C 16/50(2006.01) (86) International application number: PCT/US2005/017747 (87) International publication number: WO 2005/113856 (01.12.2005 Gazette 2005/48)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 20.05.2004 US 572813 P (71) Applicant: Dow Global Technologies Inc. Midland, MI 48674 (US)	(72) Inventors: DINEGA, Dmitry, P. Midland, MI 48642 (US) WEIKART, Christopher, M. Midland, MI 48640 (US) (74) Representative: Raynor, John et al Beck Greener Fulwood House, 12 Fulwood Place, London WC1V 6HR London WC1V 6HR (GB)