(19)
(11) EP 1 757 665 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
11.04.2012 Bulletin 2012/15

(45) Mention of the grant of the patent:
22.02.2012 Bulletin 2012/08

(21) Application number: 06119461.9

(22) Date of filing: 24.08.2006
(51) International Patent Classification (IPC): 
C09G 1/02(2006.01)
H01L 21/768(2006.01)
 H01L 21/321(2006.01)
B24B 37/04(2012.01)

(54)

Aqueous dispersion for chemical mechanical polishing, kit for preparing the aqueous dispersion for a chemical mechanical polishing process, and process for producing semiconductor devices

Wässrige Dispersionsaufschlämmung für chemisch-mechanisches Polierverfahren, Kit zur Herstellung dieser Dispersionsaufschlämmung für ein chemisch-mechanisches Polierverfahren, und Verfahren zur Herstellung von Halbleitervorrichtungen

Dispersion aqueuse pour le polissage mécano-chimique, kit pour la préparation de cette dispersion pour le polissage mécano-chimique, et procédé pour la fabrication de dispositifs semiconducteurs

(84) Designated Contracting States:
DE FR GB IT

(30) Priority: 24.08.2005 JP 2005242895

(43) Date of publication of application:
28.02.2007 Bulletin 2007/09

(73) Proprietor: JSR Corporation
Minato-ku Tokyo 105-8640 (JP)

(72) Inventors:
  • Shida, Hirotaka
    Tokyo 1058640 (JP)
  • Takemura, Akihiro
    Tokyo 1058640 (JP)
  • Hattori, Masayuki
    Yatomi-shi Aichi (JP)
  • Minamihaba, Gaku
    Minato-ku Tokyo (JP)
  • Fukushima, Dai
    Minato-ku Tokyo (JP)
  • Kurashima, Nobuyuki
    Minato-ku Tokyo (JP)
  • Yamamoto, Susumu
    Minato-ku Tokyo (JP)
  • Tateyama, Yoshikuni
    Minato-ku Tokyo (JP)
  • Yano, Hiroyuki
    Minato-ku Tokyo (JP)

(74) Representative: TBK 
Bavariaring 4-6
80336 München
80336 München (DE)


(56) References cited: : 
WO-A-2005/047410
 US-A1- 2005 037 693
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).