(19)
(11) EP 1 765 526 A1

(12)

(43) Date of publication:
28.03.2007 Bulletin 2007/13

(21) Application number: 04751653.9

(22) Date of filing: 07.05.2004
(51) International Patent Classification (IPC): 
B08B 3/00(2006.01)
B08B 3/10(2006.01)
 B08B 3/02(2006.01)
(86) International application number:
PCT/US2004/014353
(87) International publication number:
WO 2005/113167 (01.12.2005 Gazette 2005/48)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(71) Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.
Danbury, CT 06810 (US)

(72) Inventors:
  • XU, Chongying
    New Milford, CT 06810 (US)
  • KORZENSKI, Michael
    Danbury, CT 06810 (US)
  • BAUM, Thomas, H.
    New Fairfield, CT 06812 (US)
  • BOROVIK, Alexander
    West Hartford, CT 06110 (US)
  • GHENCIU, Eliodor, G.
    King of Prussia, PA 19696 (US)

(74) Representative: ABG Patentes, S.L. 
Orense 68, 7th Floor
28020 Madrid
28020 Madrid (ES)

   


(54) COMPOSITIONS AND METHODS FOR DRYING PATTERNED WAFERS DURING MANUFACTURE OF INTEGRATED CIRCUITRY PRODUCTS