(19)
(11) EP 1 775 750 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
02.05.2007 Bulletin 2007/18

(43) Date of publication A2:
18.04.2007 Bulletin 2007/16

(21) Application number: 06026200.3

(22) Date of filing: 26.11.1997
(51) International Patent Classification (IPC): 
H01J 29/46(2006.01)
(84) Designated Contracting States:
DE FR GB

(30) Priority: 12.12.1996 US 766668
12.12.1996 US 766435

(62) Application number of the earlier application in accordance with Art. 76 EPC:
97949479.6 / 0958589

(71) Applicant: Canon Kabushiki Kaisha
Ohta-ku, Tokyo 146-8501 (JP)

(72) Inventors:
  • Maslennikov, Igor L.
    Cupertino, CA 95014 (US)
  • Curtin, Christopher J.
    Los Altos Hills, CA 94024 (US)
  • Cho, Steven T.
    Santa Clara, CA 95054 (US)
  • Conte, Alfred S.
    Hollister, CA 95023 (US)
  • Pothoven, Floyd R.
    Hawthorne, CA 90250 (US)
  • Cooper, Anthony J.
    Excondido, CA 92025 (US)

(74) Representative: Ebner von Eschenbach, Jennifer et al
LADAS & PARRY LLP Dachauerstrasse 37
80335 München
80335 München (DE)

   


(54) Local energy activation of getter


(57) A flat-panel device comprising:
a main compartment (70) formed with a first plate structure (40), a second plate structure (42), and a generally annular outer wall (44) that extends between the plate structures; an auxiliary compartment (72) situated outside the main compartment (70), the auxiliary compartment (72) formed with an auxiliary wall (76) that contacts the first plate structure (40) outside the main compartment (70), extends away from the first plate structure (40) and main compartment (70), bends back towards the second plate structure (42), and contacts the second plate structure (42) outside the main compartment (70), the auxiliary compartment (72) connected pressure-wise to the main compartment (70) so that the two compartments reach largely equal steady-state compartment pressures; a getter (74) situated in the auxiliary compartment (72); and control circuitry situated over the first plate structure (40) outside the compartments, the auxiliary wall (76) not extending significantly further away from the first plate structure (40) than the control circuitry.







Search report