(19)

(11)

EP 1 776 610 A2

(12)

(88) Date of publication A3: 22.04.2004 (43) Date of publication: 25.04.2007 Bulletin 2007/17 (21) Application number: 03755727.9 (22) Date of filing: 21.07.2003

(51) International Patent Classification (IPC):  G02B 6/43(2006.01) (86) International application number: PCT/US2003/022687 (87) International publication number: WO 2004/010192 (29.01.2004 Gazette 2004/05)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR (30) Priority: 22.07.2002 US 397552 P 25.10.2002 US 280492 25.10.2002 US 280505 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95050 (US)	(72) Inventors: WEST, Lawrence, C. San Jose, CA 95120 (US) MAYDEN, Dan Los Altos Hills, CA 94022 (US) BROYDO, Samuel Los Altos Hills, CA 94022 (US) BJORKMAN, Claes Los Altos Hills, CA 94022 (US) (74) Representative: Hutchinson, Glenn Stanley  Harrison Goddard Foote, Fountain Precinct Balm Green Sheffield S1 2JA Sheffield S1 2JA (GB)