(19)

(11)

EP 1 779 412 A2

(12)

(88) Date of publication A3: 12.10.2006 (43) Date of publication: 02.05.2007 Bulletin 2007/18 (21) Application number: 05760423.3 (22) Date of filing: 09.06.2005

(51) International Patent Classification (IPC):  H01L 21/00(2006.01) B41J 2/175(2006.01) (86) International application number: PCT/US2005/020300 (87) International publication number: WO 2006/007343 (19.01.2006 Gazette 2006/03)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR Designated Extension States: AL BA HR LV MK YU (30) Priority: 30.06.2004 US 881389 (71) Applicant: MOTOROLA, INC. Schamburg, Illinois 60196 (US)

(72) Inventors: ADEWOLE, Hakeem B. Schaumburg, Illinois 60194 (US) BRAZIS, Paul W. South Elgin, Illinois 60177 (US) GAMOTA, Daniel R. Palatine, Illinois 60074 (US) WIELGUS, Jerzy Mount Prospect, Illinois 60056 (US) ZHANG, Jie Buffalo Grove, Illinois 60089 (US) (74) Representative: McLeish, Nicholas Alistair Maxwell  Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)