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(11)

EP 1 779 415 A1

(12)

(43) Date of publication: 02.05.2007 Bulletin 2007/18 (21) Application number: 05769785.6 (22) Date of filing: 09.08.2005

(51) International Patent Classification (IPC):  H01L 21/301(2006.01) H01L 21/60(2006.01) H01L 31/0352(2006.01) H01L 31/052(2006.01) B26D 7/02(2006.01) B65H 3/44(2006.01) G11B 17/26(2006.01) H01L 21/58(2006.01) H01L 21/68(2006.01) H01L 31/05(2006.01) B23K 101/40(2006.01) B65H 1/02(2006.01) B65G 47/24(2006.01) (86) International application number: PCT/AU2005/001193 (87) International publication number: WO 2006/015430 (16.02.2006 Gazette 2006/07)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 09.08.2004 AU 2004904479 09.08.2004 AU 2004904476 09.08.2004 AU 2004904478 17.06.2005 AU 2005903172 (71) Applicant: THE AUSTRALIAN NATIONAL UNIVERSITY Acton Australian Capital Territory 0200 (AU)	(72) Inventors: EVERETT, Vernie, Allan Kaleen,Australian Capital Territory 2617 (AU) BLAKERS, Andrew, William Aranda,Australian Capital Territory 2614 (AU) (74) Representative: Frost, Alex John  Boult Wade Tennant, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)