(19)

(11)

EP 1 779 416 A2

(12)

(88) Date of publication A3: 10.08.2006 (43) Date of publication: 02.05.2007 Bulletin 2007/18 (21) Application number: 05772270.4 (22) Date of filing: 14.07.2005

(51) International Patent Classification (IPC):  H01L 21/336(2006.01) (86) International application number: PCT/US2005/025212 (87) International publication number: WO 2006/020064 (23.02.2006 Gazette 2006/08)

(84) Designated Contracting States: DE IT (30) Priority: 15.07.2004 US 893519 (71) Applicant: Fairchild Semiconductor Corporation South Portland, ME 04106 (US)	(72) Inventors: CAI, Jun Scarborough, ME 04074 (US) HARLEY-STEAD, Michael Portland, ME 04101 (US) HOLT, Jim G. Los Altos, CA 94024 (US) (74) Representative: Schmidt, Steffen J.  Wuesthoff & Wuesthoff, Patent- und Rechtsanwälte, Schweigerstrasse 2 81541 München 81541 München (DE)