(19)
(11) EP 1 787 330 A2

(12)

(88) Date of publication A3:
28.12.2006

(43) Date of publication:
23.05.2007 Bulletin 2007/21

(21) Application number: 05746303.6

(22) Date of filing: 06.05.2005
(51) International Patent Classification (IPC): 
H01L 29/04(2006.01)
(86) International application number:
PCT/US2005/015774
(87) International publication number:
WO 2005/112123 (24.11.2005 Gazette 2005/47)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR LV MK YU

(30) Priority: 10.05.2004 US 569749 P

(71) Applicant: The Regents of the University of California
Oakland, CA 94607 (US)

(72) Inventors:
  • CHAKRABORTY, Arpan
    Isla Vista, CA 93117 (US)
  • HASKELL, Benjamin A.
    Goleta, CA 93117 (US)
  • KELLER, Stacia
    Goleta, CA 93117 (US)
  • SPECK, James S.
    Goleta, CA 93117 (US)
  • DENBAARS, Steven P.
    Goleta, CA 93117 (US)
  • NAKAMURA, Shuji
    Santa Barbara, CA 93110 (US)
  • MISHRA, Umesh K.
    Santa Barbara, CA 93108 (US)

(74) Representative: Campbell, Patrick John Henry 
J.A. Kemp & Co., 14 South Square, Gray's Inn
London WC1R 5JJ
London WC1R 5JJ (GB)

   


(54) FABRICATION OF NONPOLAR INDIUM GALLIUM NITRIDE THIN FILMS, HETEROSTRUCTURES AND DEVICES BY METALORGANIC CHEMICAL VAPOR DEPOSITION