(19)

(11)

EP 1 789 605 A2

(12)

(88) Date of publication A3: 21.09.2006 (43) Date of publication: 30.05.2007 Bulletin 2007/22 (21) Application number: 05764564.0 (22) Date of filing: 07.07.2005

(51) International Patent Classification (IPC):  C23C 16/455(2006.01) C23C 16/509(2006.01) (86) International application number: PCT/US2005/024165 (87) International publication number: WO 2006/017136 (16.02.2006 Gazette 2006/07)

(84) Designated Contracting States: CH DE LI (30) Priority: 12.07.2004 US 587173 P 12.10.2004 US 962936 22.12.2004 US 21416 02.06.2005 US 143506 (71) Applicant: Applied Materials, Inc. Santa Clara, CA 95054 (US)	(72) Inventors: CHOI, Soo, Young Fremont, CA 94539 (US) PARK, Beom, Soo San Jose, CA 95119 (US) WHITE, John, M. Hayward, CA 94541 (US) TINER, Robin, L. Santa Cruz, CA 95065 (US) (74) Representative: Zimmermann & Partner  Postfach 33 09 20 80069 München 80069 München (DE)