....CHDE............LI..........................................................*XDIM360 (Ver 1.5 21 Nov 2005) - 1100000/0 1710000/01789605A220070530EP05764564.02005070720070212enenen587173 P20040712US96293620041012US2141620041222US14350620050602US2007053020072220070530200722C23C 16/455 20060101AFI20060818BHEP C23C 16/509 20060101ALI20060818BHEP deSTEUERUNG DER PLASMAEINHEITLICHKEIT DURCH GASDIFFUSORKRÜMMUNGenPLASMA UNIFORMITY CONTROL BY GAS DIFFUSER CURVATUREfrMAITRISE DE L'UNIFORMITE DU PLASMA PAR LA COURBURE DU DIFFUSEURApplied Materials, Inc.0727703012505R-EP3050 Bowers AvenueSanta Clara, CA 95054USCHOI, Soo, Young40907 Rioja CourtFremont, CA 94539USPARK, Beom, Soo6870 Aintree DriveSan Jose, CA 95119USWHITE, John, M.2811 Colony View PlaceHayward, CA 94541USTINER, Robin, L.144 Lance CourtSanta Cruz, CA 95065USZimmermann & Partner00101591Postfach 33 09 2080069 MünchenDECHDELIUS200502416520050707enWO20060171362006021620060720060921000000