(19)
(11) EP 1 789 752 A2

(12)

(88) Date of publication A3:
22.02.2007

(43) Date of publication:
30.05.2007 Bulletin 2007/22

(21) Application number: 05816196.9

(22) Date of filing: 13.09.2005
(51) International Patent Classification (IPC): 
G01B 11/02(2006.01)
(86) International application number:
PCT/US2005/032420
(87) International publication number:
WO 2006/031733 (23.03.2006 Gazette 2006/12)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK YU

(30) Priority: 13.09.2004 US 609406 P

(71) Applicant: UNIVERSITY OF SOUTH CAROLINA
Columbia, SC 29208 (US)

(72) Inventor:
  • MYRICK, MICHAEL, L.
    IRMO, SC 29063 (US)

(74) Representative: Schlief, Thomas P. 
Friedrich-Ebert-Strasse 84
85055 Ingolstadt
85055 Ingolstadt (DE)

   


(54) THIN FILM INTERFERENCE FILTER AND BOOTSTRAP METHOD FOR INTERFERENCE FILTER THIN FILM DEPOSITION PROCESS CONTROL