(19)
(11) EP 1 789 753 A1

(12)

(43) Date of publication:
30.05.2007 Bulletin 2007/22

(21) Application number: 05784553.9

(22) Date of filing: 07.09.2005
(51) International Patent Classification (IPC): 
G01B 11/06(2006.01)
(86) International application number:
PCT/GB2005/003432
(87) International publication number:
WO 2006/027568 (16.03.2006 Gazette 2006/11)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 07.09.2004 GB 0419772

(71) Applicant: Scalar Technologies Ltd
Livingstno EH54 7DQ (GB)

(72) Inventors:
  • GREENAWAY. Alan, H.
    Edinburgh EH14 4AS (GB)
  • BAIN, Ian, Scalar Technologies Limited
    Livingston EH54 7DQ (GB)
  • FAICHNIE, David
    Edinburgh EH14 4AS (GB)
  • KARSTAD, Ketil, Scalar Technologies Limited
    Livingston EH54 7DQ (GB)

(74) Representative: Fulton, David James 
Kennedys Patent Agency Limited 185 St Vincent Street
GB-Glasgow G2 5QD
GB-Glasgow G2 5QD (GB)

   


(54) METHOD AND APPARATUS FOR THIN FILM METROLOGY