IN-LINE PROCESS FOR MAKING THIN FILM ELECTRONIC DEVICES - Patent 1789996

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EP 1 789 996 A1

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(43)	Date of publication:
	30.05.2007 Bulletin 2007/22

(21)	Application number: 05779028.9

(22)	Date of filing: 24.08.2005

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International Patent Classification (IPC):

H01L 21/00^(2006.01)

H01L 21/84^(2006.01)

(86)	International application number:
	PCT/EP2005/054157

(87)	International publication number:
	WO 2006/021568 (02.03.2006 Gazette 2006/09)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

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Priority:

24.08.2004 US 923792
02.03.2005 EP 05101618

(71)	Applicant: OTB Group B.V.
	5657 EB Eindhoven (NL)

(72)	Inventors:
	KOK, Ronaldus Joannes Cornelis Maria NL-5613 BE Eindhoven (NL) EVERS, Marinus Franciscus Johannes NL-5591 JM Heeze (NL) DINGS, Franciscus Cornelis NL-5505 TD Veldhoven (NL)

(74)	Representative: Clarkson, Paul Magnus et al
	Howrey LLP Rembrandt Tower 31st Floor Amstelplein 1 PO Box 94361 1090 GJ Amsterdam 1090 GJ Amsterdam (NL)

(54)	IN-LINE PROCESS FOR MAKING THIN FILM ELECTRONIC DEVICES