Capacitive ultrasonic transducer and method of fabricating the same

(19)

(11)

EP 1 790 419 A3

(12)	EUROPEAN PATENT APPLICATION

(88)	Date of publication A3:
	12.05.2010 Bulletin 2010/19

(43)	Date of publication A2:
	30.05.2007 Bulletin 2007/22

(21)	Application number: 06013590.2

(22)	Date of filing: 30.06.2006

(51)

International Patent Classification (IPC):

B06B 1/02^(2006.01)

G01H 11/06^(2006.01)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
	Designated Extension States:
	AL BA HR MK RS

(30)

Priority:

24.11.2005 CN 200510123960

(71)	Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
	Chutung, Hsinchu (TW)

(72)	Inventors:
	Chang, Ming-Wei Taiping City, Taichung County 411 (TW) Deng, Tse-Min Hsinchu City 300 (TW) Gwo, Tsung-Ju Taipei County 220 (TW) Chung, Zhen-Yuan Taoyuan County 330 (TW)

(74)	Representative: Marchand, André
	OMNIPAT, 24 Place des Martyrs de la Résistance 13100 Aix-en-Provence 13100 Aix-en-Provence (FR)

(54)	Capacitive ultrasonic transducer and method of fabricating the same

(57) A capacitive ultrasonic transducer (30) that includes a first electrode (31), an insulating layer (32) formed on the first electrode, at least one support frame (38) formed on the insulating layer, and a second electrode (35) formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.

Search report