<?xml version="1.0" encoding="UTF-8"?><!DOCTYPE ep-patent-document PUBLIC "-//EPO//EP PATENT DOCUMENT 1.0//EN" "ep-patent-document-v1-0.dtd"><ep-patent-document id="EP05787327A1" file="05787327.5" lang="de" country="EP" doc-number="1794341" kind="A1" date-publ="20070613" status="n" dtd-version="ep-patent-document-v1-1"><SDOBI lang="de"><B000><eptags><B001EP>ATBECHDEDKESFRGBGRITLILUNLSEMCPTIESILTLVFIRO..CY..TRBGCZEEHUPLSK....IS..........</B001EP><B003EP>*</B003EP><B005EP>X</B005EP><B007EP>DIM360 (Ver 1.5  21 Nov 2005) -  1100000/0 1710000/0</B007EP></eptags></B000><B100><B110>1794341</B110><B130>A1</B130><B140><date>20070613</date></B140><B190>EP</B190></B100><B200><B210>05787327.5</B210><B220><date>20050901</date></B220><B240><B241><date>20070307</date></B241></B240><B250>de</B250><B251EP>de</B251EP><B260>de</B260></B200><B300><B310>04023972</B310><B320><date>20041007</date></B320><B330><ctry>EP</ctry></B330></B300><B400><B405><date>20070613</date><bnum>200724</bnum></B405><B430><date>20070613</date><bnum>200724</bnum></B430></B400><B500><B510EP><classification-ipcr sequence="1"><text>C23C   4/02        20060101AFI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="2"><text>C23C   4/08        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="3"><text>C23C  28/00        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="4"><text>B23K  26/22        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="5"><text>B23K  26/34        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="6"><text>B23K  10/02        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="7"><text>B23K  15/00        20060101ALI20060831BHEP        </text></classification-ipcr><classification-ipcr sequence="8"><text>F01D   5/28        20060101ALI20060831BHEP        </text></classification-ipcr></B510EP><B540><B541>de</B541><B542>VERFAHREN ZUR HERSTELLUNG EINES SCHICHTSYSTEMS</B542><B541>en</B541><B542>METHOD FOR PRODUCING A LAYER SYSTEM</B542><B541>fr</B541><B542>PROCEDE DE PRODUCTION D'UN SYSTEME STRATIFIE</B542></B540></B500><B700><B710><B711><snm>SIEMENS AKTIENGESELLSCHAFT</snm><iid>00200520</iid><irf>2004P09158WE 01</irf><adr><str>Wittelsbacherplatz 2</str><city>80333 München</city><ctry>DE</ctry></adr></B711></B710><B720><B721><snm>BOSTANJOGLO, Georg</snm><adr><str>Odenwaldstr. 17</str><city>12161 Berlin</city><ctry>DE</ctry></adr></B721><B721><snm>COX, Nigel-Philip</snm><adr><str>Dohne 54A</str><city>45468 Mülheim an der Ruhr</city><ctry>DE</ctry></adr></B721><B721><snm>WILKENHÖNER, Rolf</snm><adr><str>Iltisfang 30</str><city>14532 Kleinmachnow</city><ctry>DE</ctry></adr></B721></B720></B700><B800><B840><ctry>AT</ctry><ctry>BE</ctry><ctry>BG</ctry><ctry>CH</ctry><ctry>CY</ctry><ctry>CZ</ctry><ctry>DE</ctry><ctry>DK</ctry><ctry>EE</ctry><ctry>ES</ctry><ctry>FI</ctry><ctry>FR</ctry><ctry>GB</ctry><ctry>GR</ctry><ctry>HU</ctry><ctry>IE</ctry><ctry>IS</ctry><ctry>IT</ctry><ctry>LI</ctry><ctry>LT</ctry><ctry>LU</ctry><ctry>LV</ctry><ctry>MC</ctry><ctry>NL</ctry><ctry>PL</ctry><ctry>PT</ctry><ctry>RO</ctry><ctry>SE</ctry><ctry>SI</ctry><ctry>SK</ctry><ctry>TR</ctry></B840><B860><B861><dnum><anum>EP2005054303</anum></dnum><date>20050901</date></B861><B862>de</B862></B860><B870><B871><dnum><pnum>WO2006040221</pnum></dnum><date>20060420</date><bnum>200616</bnum></B871></B870></B800></SDOBI></ep-patent-document>