(19)
(11) EP 1 796 873 A1

(12)

(43) Date of publication:
20.06.2007 Bulletin 2007/25

(21) Application number: 05798546.7

(22) Date of filing: 15.09.2005
(51) International Patent Classification (IPC): 
B24B 37/04(2006.01)
B24B 49/00(2006.01)
(86) International application number:
PCT/IB2005/053043
(87) International publication number:
WO 2006/035337 (06.04.2006 Gazette 2006/14)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK YU

(30) Priority: 27.09.2004 EP 04104686

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventor:
  • NGUYEN HOANG, Viet
    NL-5656 AA Eindhoven (NL)

(74) Representative: Röggla, Harald et al
NXP Semiconductors Austria GmbH IP Department Gutheil-Schoder-Gasse 8-12
1101 Vienna
1101 Vienna (AT)

   


(54) FLEXIBLE RINSING STEP IN A CMP PROCESS