(19)
(11) EP 1 797 489 A2

(12)

(88) Date of publication A3:
01.03.2007

(43) Date of publication:
20.06.2007 Bulletin 2007/25

(21) Application number: 05772286.0

(22) Date of filing: 07.07.2005
(51) International Patent Classification (IPC): 
G05D 7/06(2006.01)
(86) International application number:
PCT/US2005/024084
(87) International publication number:
WO 2006/017116 (16.02.2006 Gazette 2006/07)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
Designated Extension States:
AL BA HR MK YU

(30) Priority: 09.07.2004 US 887591
21.09.2004 US 946031

(71) Applicant: Celerity, Inc.
Austin, TX 78728 (US)

(72) Inventors:
  • TISON, Stuart, A.
    McKinney, TX 75070 (US)
  • SUKUMARAN, Sandeep
    McKinney, TX (US)
  • BARKER, James
    Lewisville, TX (US)

(74) Representative: Walaski, Jan Filip et al
Venner Shipley LLP 20 Little Britain
London EC1A 7DH
London EC1A 7DH (GB)

   


(54) METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER