DEEP TRENCH ELECTRICALLY ISOLATED MEDIUM VOLTAGE CMOS DEVICES AND METHOD FOR MAKING THE SAME - Patent 1797590

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EP 1 797 590 A1

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(43)	Date of publication:
	20.06.2007 Bulletin 2007/25

(21)	Application number: 05779720.1

(22)	Date of filing: 22.09.2005

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International Patent Classification (IPC):

H01L 21/8238^(2006.01)

H01L 21/8234^(2006.01)

(86)	International application number:
	PCT/IB2005/053143

(87)	International publication number:
	WO 2006/035387 (06.04.2006 Gazette 2006/14)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

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Priority:

30.09.2004 US 614723 P

(71)	Applicant: Koninklijke Philips Electronics N.V.
	5621 BA Eindhoven (NL)

(72)	Inventors:
	ALBU, Lucian Remus Briarcliff Manor, NY 10510-8001 (US) HAUSSER, Stefan Briarcliff Manor, NY 10510-8001 (US) EUEN, Wolfgang Briarcliff Manor, NY 10510-8001 (US) SCHLIGTENHORST, Holger Briarcliff Manor, NY 10510-8001 (US)

(74)	Representative: Schouten, Marcus Maria
	Philips Intellectual Property & Standards P.O. Box 220 5600 AE Eindhoven 5600 AE Eindhoven (NL)

(54)	DEEP TRENCH ELECTRICALLY ISOLATED MEDIUM VOLTAGE CMOS DEVICES AND METHOD FOR MAKING THE SAME