(19)
(11)
EP 1 799 402 A1
(12)
(43)
Date of publication:
27.06.2007
Bulletin 2007/26
(21)
Application number:
05808056.5
(22)
Date of filing:
05.10.2005
(51)
International Patent Classification (IPC):
B24D
11/00
(2006.01)
(86)
International application number:
PCT/US2005/035979
(87)
International publication number:
WO 2006/042010
(
20.04.2006
Gazette 2006/16)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
(30)
Priority:
06.10.2004
US 616944 P
27.12.2004
US 639257 P
(71)
Applicant:
Bajaj, Rajeev
Fremont, California 94539 (US)
(72)
Inventor:
Bajaj, Rajeev
Fremont, California 94539 (US)
(74)
Representative:
Pluckrose, Anthony William
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)
(54)
METHOD AND APPARATUS FOR IMPROVED CHEMICAL MECHANICAL PLANARIZATION