(19)
(11) EP 1 799 402 A1

(12)

(43) Date of publication:
27.06.2007 Bulletin 2007/26

(21) Application number: 05808056.5

(22) Date of filing: 05.10.2005
(51) International Patent Classification (IPC): 
B24D 11/00(2006.01)
(86) International application number:
PCT/US2005/035979
(87) International publication number:
WO 2006/042010 (20.04.2006 Gazette 2006/16)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 06.10.2004 US 616944 P
27.12.2004 US 639257 P

(71) Applicant: Bajaj, Rajeev
Fremont, California 94539 (US)

(72) Inventor:
  • Bajaj, Rajeev
    Fremont, California 94539 (US)

(74) Representative: Pluckrose, Anthony William 
BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) METHOD AND APPARATUS FOR IMPROVED CHEMICAL MECHANICAL PLANARIZATION