| (84) |
Designated Contracting States: |
|
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE
SI SK TR |
|
Designated Extension States: |
|
AL BA HR MK YU |
| (30) |
Priority: |
20.08.2004 US 923436
20.08.2004 US 922762
20.08.2004 US 923132
20.08.2004 US 923363
|
| (71) |
Applicant: SEMITOOL, INC. |
|
Kalispell,
Montana 59901 (US) |
|
| (72) |
Inventors: |
|
- DOLECHEK, Kert, L.
Kalispell, MT 59901 (US)
- THOMPSON, Raymon, F.
Kalispell, MT 59901 (US)
|
| (74) |
Representative: Moore, Barry et al |
|
Hanna, Moore & Curley
13 Lower Lad Lane
Dublin 2
Dublin 2 (IE) |
|
