(19)
(11) EP 1 799 879 A1

(12)

(43) Date of publication:
27.06.2007 Bulletin 2007/26

(21) Application number: 04784214.1

(22) Date of filing: 14.09.2004
(51) International Patent Classification (IPC): 
C23C 16/54(2006.01)
(86) International application number:
PCT/US2004/030275
(87) International publication number:
WO 2006/031234 (23.03.2006 Gazette 2006/12)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

(71) Applicant: OptiSolar Inc.
Hayward, CA 94544-7916 (US)

(72) Inventors:
  • KESHNER, Marvin S.
    Mountain View, CA 94043 (US)
  • MCCLELLAND, Paul H.
    Monmouth, Oregon 97361 (US)

(74) Representative: Wilson Gunn 
5th Floor Blackfriars House The Parsonage
Manchester M3 2JA
Manchester M3 2JA (GB)

   


(54) PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD