(19)
(11)
EP 1 799 879 A1
(12)
(43)
Date of publication:
27.06.2007
Bulletin 2007/26
(21)
Application number:
04784214.1
(22)
Date of filing:
14.09.2004
(51)
International Patent Classification (IPC):
C23C
16/54
(2006.01)
(86)
International application number:
PCT/US2004/030275
(87)
International publication number:
WO 2006/031234
(
23.03.2006
Gazette 2006/12)
(84)
Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
(71)
Applicant:
OptiSolar Inc.
Hayward, CA 94544-7916 (US)
(72)
Inventors:
KESHNER, Marvin S.
Mountain View, CA 94043 (US)
MCCLELLAND, Paul H.
Monmouth, Oregon 97361 (US)
(74)
Representative:
Wilson Gunn
5th Floor Blackfriars House The Parsonage
Manchester M3 2JA
Manchester M3 2JA (GB)
(54)
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD