(19)
(11) EP 1 803 149 A2

(12)

(88) Date of publication A3:
27.07.2006

(43) Date of publication:
04.07.2007 Bulletin 2007/27

(21) Application number: 05806419.7

(22) Date of filing: 07.09.2005
(51) International Patent Classification (IPC): 
H01L 21/3105(2006.01)
(86) International application number:
PCT/US2005/031936
(87) International publication number:
WO 2006/033836 (30.03.2006 Gazette 2006/13)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 15.09.2004 US 940686
12.08.2005 US 203558

(71) Applicant: Honeywell International, Inc.
Morristown, New Jersey 07962 (US)

(72) Inventors:
  • BHANAP, Anil, S.
    Milpitas, CA 95035 (US)
  • KOROLEV, Boris, A.
    San Jose, CA 95126 (US)
  • LEUNG, Roger, Y.
    San Jose, CA 95120 (US)
  • MUNOZ, Beth, C.
    San Jose, CA 95120 (US)
  • RAMOS, Teresa, A.
    San Jose, CA 95112 (US)
  • ROTH, Robert R.
    Sunnyvale, CA 94085 (US)
  • APEN, Paul, G.
    San Francisco, CA 94123 (US)
  • ENDISCH, Denis, H.
    Cupertino, CA 95014 (US)
  • DANIELS, Brian, J.
    La Honda, CA 94020 (US)
  • NAMAN, Ananth
    San Jose, CA 95118 (US)
  • IWAMOTO, Nancy
    Ramona, CA 92065 (US)

(74) Representative: Hucker, Charlotte Jane 
Gill Jennings & Every Broadgate House 7 Eldon Street
London EC2M 7LH
London EC2M 7LH (GB)

   


(54) TREATING AGENT MATERIALS