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(11)

EP 1 805 109 A1

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(43) Date of publication: 11.07.2007 Bulletin 2007/28 (21) Application number: 05777110.7 (22) Date of filing: 30.08.2005

(51) International Patent Classification (IPC):  C02F 1/467(2006.01) C02F 9/06(2006.01) C02F 1/461(2006.01) C02F 9/14(2006.01) (86) International application number: PCT/JP2005/016183 (87) International publication number: WO 2006/025563 (09.03.2006 Gazette 2006/10)

(84) Designated Contracting States: DE (30) Priority: 01.09.2004 JP 2004253946 (71) Applicant: EBARA CORPORATION Ohta-ku, Tokyo 144-8510 (JP)	(72) Inventors: SERIKAWA, Robert Masahiro, c/o Ebara Research Co., Ltd. Fujisawa-shi, Kanagawa 251-8502 (JP) SASAKI, Kenichi, c/o Ebara Research Co., Ltd. Fujisawa-shi, Kanagawa 251-8502 (JP) USUI, Takashi, c/o Ebara Corporation Ohta-ku, Tokyo 144-8510 (JP) (74) Representative: Wagner, Karl H. et al Wagner & Geyer Gewürzmühlstrasse 5 80538 München 80538 München (DE)