(19)
(11) EP 1 807 556 A2

(12)

(88) Date of publication A3:
08.09.2006

(43) Date of publication:
18.07.2007 Bulletin 2007/29

(21) Application number: 05746524.7

(22) Date of filing: 08.04.2005
(51) International Patent Classification (IPC): 
C30B 25/00(2006.01)
(86) International application number:
PCT/US2005/012157
(87) International publication number:
WO 2006/031257 (23.03.2006 Gazette 2006/12)
(84) Designated Contracting States:
DE FR

(30) Priority: 14.09.2004 US 610120 P
31.12.2004 WO PCT/US2004/043854
11.03.2005 US 660779 P

(71) Applicant: Arizona Board of Regents, acting for and on behalf of Arizona State University
Tempe, AZ 85281 (US)

(72) Inventors:
  • KOUVETAKIS, John
    Mesa, AZ 85207 (US)
  • TSONG, Ignatius, S., T.
    Tempe, AZ 85284 (US)
  • HU, Changwu
    Gilbert, AZ 85233 (US)
  • TOLLE, John
    Gilbert, AZ 85233 (US)

(74) Representative: Zwicker, Jörk et al
Dr. Volker Vossius Patentanwälte-Rechtsanwälte Geibelstrasse 6
81679 München
81679 München (DE)

   


(54) METHOD FOR GROWING Si-Ge SEMICONDUCTOR MATERIALS AND DEVICES ON SUBSTRATES