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(11) | EP 1 808 691 A8 |
(12) | CORRECTED EUROPEAN PATENT APPLICATION |
Note: Bibliography reflects the latest situation |
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(54) | Method and apparatus for determining the concentration of a chemical in a gas mixture |
(57) A method and apparatus for determining the concentration of chemicals in a gas mixture
inside a chamber. A capacitor is exposed to the gas mixture, wherein the gas mixture
comprises a dielectric material between the plates of the capacitor. Permittivity
of the dielectric is affected by the relative concentrations of the chemical components,
and thus a measurement of the capacitance is used to determine the concentration levels
of multiple chemical components in the gas mixture.
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