(19)
(11) EP 1 808 882 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
08.02.2012 Bulletin 2012/06

(45) Mention of the grant of the patent:
21.09.2011 Bulletin 2011/38

(21) Application number: 07250050.7

(22) Date of filing: 08.01.2007
(51) International Patent Classification (IPC): 
H01J 37/26(2006.01)

(54)

Charged particle beam device

Strahlvorrichtung für geladene Teilchen

Dispositif de faisceau de particules chargées

(84) Designated Contracting States:
CZ DE NL

(30) Priority: 12.01.2006 GB 0600577

(43) Date of publication of application:
18.07.2007 Bulletin 2007/29

(60) Divisional application:
11179620.7 / 2393104

(73) Proprietor: Carl Zeiss SMT Limited
Cambridge CB1 3JS (GB)

(72) Inventor:
  • Stubbs, Tim Robert
    Soham, Cambridgeshire CB7 5GU (GB)

(74) Representative: Roberts, David Leslie 
Nash Matthews 90-92 Regent Street
Cambridge CB2 1DP
Cambridge CB2 1DP (GB)


(56) References cited: : 
WO-A-01/80200
US-A1- 2005 045 822
 DE-A1- 10 351 782
US-B1- 6 822 232
   
  • SCHMITT S: "FERNWIRKEN UEBERS HANDY" FUNKSCHAU, WEKA FACHZEITSCHRIFTEN VERLAG, POING, DE, vol. 73, no. 13, 9 June 2000 (2000-06-09), pages 28-30, XP001030325 ISSN: 0016-2841
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).