(19)

(11)

EP 1 810 319 A1

(12)

(43) Date of publication: 25.07.2007 Bulletin 2007/30 (21) Application number: 05746147.7 (22) Date of filing: 27.05.2005

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) (86) International application number: PCT/KR2005/001584 (87) International publication number: WO 2006/041250 (20.04.2006 Gazette 2006/16)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR (30) Priority: 13.10.2004 KR 10200040081 (71) Applicant: Adaptive Plasma Technology Corp. Icheon-si, Gyeonggi-do 467-813 (KR)	(72) Inventor: KIM, Nam-hun, 804-302 Byeokjeokgol Dusan Apt. Suwon-si, Gyeonggi-do 442-470 (KR) (74) Representative: Hirsch & Associés  58, avenue Marceau 75008 Paris 75008 Paris (FR)