(19)
(11) EP 1 811 339 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
21.04.2021 Bulletin 2021/16

(45) Mention of the grant of the patent:
17.03.2021 Bulletin 2021/11

(21) Application number: 07001325.5

(22) Date of filing: 22.01.2007
(51) International Patent Classification (IPC): 
G03F 7/004(2006.01)
G03F 7/20(2006.01)
 G03F 7/039(2006.01)

(54)

Pattern forming method

Verfahren zur Herstellung eines Musters

Procédé de fabrication de motifs

(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 23.01.2006 JP 2006013978
06.06.2006 JP 2006157227

(43) Date of publication of application:
25.07.2007 Bulletin 2007/30

(73) Proprietor: FUJIFILM Corporation
Tokyo 106-8620 (JP)

(72) Inventors:
  • Kanna, Shinichi
    Haibara-gun Shizuoka (JP)
  • Inabe, Haruki
    Haibara-gun Shizuoka (JP)
  • Kanda, Hiromi
    Haibara-gun Shizuoka (JP)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)


(56) References cited: : 
EP-A- 1 598 704
EP-A- 1 764 649
EP-A- 1 767 992
US-A1- 2002 081 520
 EP-A- 1 601 008
EP-A- 1 764 652
EP-A1- 1 720 072
US-A1- 2005 046 934
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).