SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED POLY-SILICON FILMS - Patent 1812958

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EP 1 812 958 A1

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(43)	Date of publication:
	01.08.2007 Bulletin 2007/31

(21)	Application number: 04811722.0

(22)	Date of filing: 18.11.2004

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International Patent Classification (IPC):

H01L 21/20^(2006.01)

B23K 26/00^(2006.01)

(86)	International application number:
	PCT/US2004/039055

(87)	International publication number:
	WO 2006/055003 (26.05.2006 Gazette 2006/21)

(84)	Designated Contracting States:
	AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

(71)	Applicant: The Trustees of Columbia University in the City of New York
	New York, NY 10027 (US)

(72)	Inventors:
	IM, James, S. New York, NY 10025 (US) VAN DER WILT, Paul, Christian New York, NY 10025 (US)

(74)	Representative: Lawrence, John
	Barker Brettell 138 Hagley Road Edgbaston Birmingham B16 9PW Birmingham B16 9PW (GB)

(54)	SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED POLY-SILICON FILMS