(19)
(11) EP 1 825 499 A1

(12)

(43) Date of publication:
29.08.2007 Bulletin 2007/35

(21) Application number: 05810361.5

(22) Date of filing: 17.11.2005
(51) International Patent Classification (IPC): 
H01L 21/00(2006.01)
(86) International application number:
PCT/EP2005/012323
(87) International publication number:
WO 2006/063652 (22.06.2006 Gazette 2006/25)
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

(30) Priority: 16.12.2004 IT MO20040332

(71) Applicant: Smart Res S.R.L.
41100 Modena (IT)

(72) Inventor:
  • LOLLI, Marcello
    I-41051 Castelnuovo Rangone (IT)

(74) Representative: Crugnola, Pietro et al
Luppi Crugnola & Partners S.r.l. Viale Corassori 54
41100 Modena
41100 Modena (IT)

   


(54) SYSTEM FOR MULTIPLE REMOVAL OF MICROCHIPS FROM A WAFER CONSISTING OF A PLURALITY OF MICROCHIPS