(19)

(11)

EP 1 825 519 A1

(12)

(43) Date of publication: 29.08.2007 Bulletin 2007/35 (21) Application number: 05821307.5 (22) Date of filing: 05.12.2005

(51) International Patent Classification (IPC):  H01L 29/772(2006.01) (86) International application number: PCT/KR2005/004116 (87) International publication number: WO 2006/062317 (15.06.2006 Gazette 2006/24)

(84) Designated Contracting States: AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR (30) Priority: 08.12.2004 KR 20041033063 11.05.2005 KR 20050039098 (71) Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE Daejeon-city 305-350 (KR)	(72) Inventors: YOUN, Doo-hyeb Daejeon-city 305-761 (KR) KIM, Hyun-tak Daejeon-city 305-761 (KR) CHAE, Byung-gyu Daejeon-city 305-350 (KR) MAENG, Sung-lyul Cheongju-city, Chungcheongbuk-do 361-808 (KR) KANG, Kwang-yong Daejeon-city 305-707 (KR) (74) Representative: Betten & Resch  Patentanwälte, Theatinerstrasse 8 80333 München 80333 München (DE)