(19)
(11) EP 1 826 814 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
13.04.2011 Bulletin 2011/15

(45) Mention of the grant of the patent:
24.11.2010 Bulletin 2010/47

(21) Application number: 05814536.8

(22) Date of filing: 12.12.2005
(51) International Patent Classification (IPC): 
H01L 21/22(2006.01)
 H01L 21/265(2006.01)
(86) International application number:
PCT/JP2005/022799
(87) International publication number:
WO 2006/064772 (22.06.2006 Gazette 2006/25)

(54)

PLASMA DOPING METHOD

PLASMA-DOTIERUNGSVERFAHREN

PROCEDE DE DOPAGE AU PLASMA

(84) Designated Contracting States:
DE FR GB

(30) Priority: 13.12.2004 JP 2004360122
26.04.2005 JP 2005128301

(43) Date of publication of application:
29.08.2007 Bulletin 2007/35

(73) Proprietor: Panasonic Corporation
Kadoma-shi Osaka 571-8501 (JP)

(72) Inventors:
  • SASAKI, Yuichiro
    Moriguchi-shi, Osaka 570-8501 (JP)
  • OKASHITA, Katsumi
    Moriguchi-shi, Osaka 570-8501 (JP)
  • ITO, Hiroyuki
    Moriguchi-shi, Osaka 570-8501 (JP)
  • MIZUNO, Bunji
    Moriguchi-shi, Osaka 570-8501 (JP)
  • OKUMURA, Tomohiro
    3-7, Shiromi 1-chome, Chuo-ku, Osaka-shi, Osaka 540-6319 (JP)

(74) Representative: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät 
Leopoldstrasse 4
80802 München
80802 München (DE)


(56) References cited: : 
JP-A- 2004 179 592
   
     
    Remarks:
    The file contains technical information submitted after the application was filed and not included in this specification
     
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).