......DE....FRGB....................................................................................JDIM360 Ver 2.15 (14 Jul 2008) - 2999001/0The file contains technical information submitted after the application was filed and not included in this specification1826814CORRECTED EUROPEAN PATENT SPECIFICATIONB8B120110413W172deBibliographieenBibliographyfrBibliographieEP05814536.8200512122007061120090805jaenen200436012220041213JP200512830120050426JP2011041320111520070829200735201011242010472010052620110413201115H01L 21/22 20060101AFI20060713BHEP H01L 21/265 20060101ALI20060713BHEP dePLASMA-DOTIERUNGSVERFAHRENenPLASMA DOPING METHODfrPROCEDE DE DOPAGE AU PLASMAJP-A- 2004 179 59220080603SASAKI, Yuichiroc/o Ultimate Junction Technologies Inc., 3-1-1, Yagumo-naka-machiMoriguchi-shi, Osaka 570-8501JPOKASHITA, Katsumic/o Ultimate Junction Technologies Inc., 3-1-1, Yagumo-naka-machiMoriguchi-shi, Osaka 570-8501JPITO, Hiroyukic/o Ultimate Junction Technologies Inc., 3-1-1, Yagumo-naka-machiMoriguchi-shi, Osaka 570-8501JPMIZUNO, Bunjic/o Ultimate Junction Technologies Inc., 3-1-1, Yagumo-naka-machiMoriguchi-shi, Osaka 570-8501JPOKUMURA, Tomohiroc/o Matsushita Electric Indus. Co Ltd IP Development Center, 19F Matsushita IMP Bldg3-7, Shiromi 1-chome, Chuo-ku, Osaka-shi, Osaka 540-6319JPPanasonic Corporation101067135EP52111TS900kja1006, Oaza KadomaKadoma-shi Osaka 571-8501JPGrünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät100060488Leopoldstrasse 480802 MünchenDEDEFRGBJP200502279920051212jaWO20060647722006062220062520070829200735